Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8514408 | Method and apparatus for real-time determination of curvature and azimuthal asymmetry of a surface | Tobias Schenk | 2013-08-20 |
| 8496375 | Pyrometer adapted for detecting UV-radiation and use thereof | Tobias Schenk, Jens Zilian | 2013-07-30 |
| 8388219 | Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer | Tobias Schenk, Steffen Uredat, Jens Zilian, Bernd Henninger, Marcello Binetti +1 more | 2013-03-05 |
| 8233158 | Method and apparatus for determining the layer thickness and the refractive index of a sample | Johannes K. Zettler | 2012-07-31 |