Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8496375 | Pyrometer adapted for detecting UV-radiation and use thereof | Joerg-Thomas Zettler, Tobias Schenk | 2013-07-30 |
| 8388219 | Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer | Joerg-Thomas Zettler, Tobias Schenk, Steffen Uredat, Bernd Henninger, Marcello Binetti +1 more | 2013-03-05 |