Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475353 | Apparatus and method for sputter depositing dielectric films on a substrate | — | 2002-11-05 |
| 6447655 | DC plasma power supply for a sputter deposition | — | 2002-09-10 |
| 6190512 | Soft plasma ignition in plasma processing chambers | — | 2001-02-20 |
| 5948215 | Method and apparatus for ionized sputtering | — | 1999-09-07 |
| 5830330 | Method and apparatus for low pressure sputtering | — | 1998-11-03 |
| 5800688 | Apparatus for ionized sputtering | Thomas J. Licata | 1998-09-01 |
| 5589041 | Plasma sputter etching system with reduced particle contamination | — | 1996-12-31 |
| 5584972 | Plasma noise and arcing suppressor apparatus and method for sputter deposition | — | 1996-12-17 |
| 5573597 | Plasma processing system with reduced particle contamination | — | 1996-11-12 |
| 5569363 | Inductively coupled plasma sputter chamber with conductive material sputtering capabilities | Robert Bayer, James A. Seirmarco | 1996-10-29 |