Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6083363 | Apparatus and method for uniform, low-damage anisotropic plasma processing | Kaihan Ashtiani | 2000-07-04 |
| 5569363 | Inductively coupled plasma sputter chamber with conductive material sputtering capabilities | Robert Bayer, Alexander D. Lantsman | 1996-10-29 |
| 5166856 | Electrostatic chuck with diamond coating | James W. Liporace | 1992-11-24 |