Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5729565 | Discharge unit and electrode for a pulsed discharge laser | Anton Meller | 1998-03-17 |
| 5430752 | Apparatus for purifying laser gas | Dirk Basting, Gerd Steinfuhrer | 1995-07-04 |
| 5396514 | Excimer laser comprising a gas reservoir and a collecting receptacle and a method of refilling the gas reservoir of the laser with halogen gas | — | 1995-03-07 |
| 5347532 | Laser having at least one anode and one cathode for preionization and/or discharge | Ulrich Rebhan | 1994-09-13 |
| 5220574 | Excimer laser with hydrogen chloride and method for producing hydrogen chloride for an excimer laser | Dirk Basting, A. Meller | 1993-06-15 |
| 5136605 | Apparatus for purifying laser gas | Dirk Basting, Gerd Steinfuhrer | 1992-08-04 |
| 5111473 | Laser gas purifying apparatus | Ulrich Rebhan, Gerd Steinfuhrer, Peter Oesterlin | 1992-05-05 |
| 5001721 | Apparatus for purifying laser gas | Ru/ diger Ludewig | 1991-03-19 |