Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515815 | Atomic layer deposition and etch in a single plasma chamber for fin field effect transistor formation | Xiang Zhou, Ganesh Upadhyaya, Yoshie Kimura, Weiye Zhu, Seokhwan Lee +1 more | 2019-12-24 |