Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653058 | Methods for reducing profile variation in photoresist trimming | Vahid Vahedi | 2003-11-25 |
| 6432832 | Method of improving the profile angle between narrow and wide features | Alan J. Miller | 2002-08-13 |
| 6316169 | Methods for reducing profile variation in photoresist trimming | Vahid Vahedi | 2001-11-13 |