PA

Puikit Agarwal

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #2,826,232 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10832909 Atomic layer etch, reactive precursors and energetic sources for patterning applications Adrien LaVoie, Purushottam Kumar 2020-11-10