Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7323116 | Methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage | Timothy J. Guiney, Rao Annapragada, Subhash Deshmukh | 2008-01-29 |