Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685695 | Aluminum nitride-based sintered compact and semiconductor holding device | Yucong Wang, Masahiro Satou | 2023-06-27 |
| 11116046 | Heater | — | 2021-09-07 |
| 10418265 | Sample holder and plasma etching apparatus using same | — | 2019-09-17 |
| 7956277 | Thermoelectric module | — | 2011-06-07 |
| 7312974 | Electrostatic chuck | — | 2007-12-25 |
| 6133557 | Wafer holding member | Yasunori KAWANABE, Hironori Inoue, Saburo Nagano | 2000-10-17 |
| 5886863 | Wafer support member | Koichi Nagasaki, Saburo Nagano, Yasunori KAWANABE, Hiroshi Aida, Kenji Kitazawa | 1999-03-23 |
| 5677253 | Wafer holding member | Hironori Inoue, Yasunori KAWANABE, Saburo Nagano, Akihiro Kukita | 1997-10-14 |
| 5413360 | Electrostatic chuck | Hitoshi Atari | 1995-05-09 |