Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643115 | Electrostatic chuck | Katsushi Sakaue, Shoji Kosaka, Ichio Kiyofuji, Junji Ohe, Masaki Terazono +2 more | 2003-11-04 |
| 5413360 | Electrostatic chuck | Kazuhiro Kuchimachi | 1995-05-09 |