Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5866468 | Method for fabricating an SOI substrate | Kei Matsumoto | 1999-02-02 |
| 5708365 | Method for analysis of silicon wafers | Shiro Yoshino, Seiichi Shimura | 1998-01-13 |
| 5679476 | Epitaxial wafer and method of fabricating thereof | Noriyuki Uemura | 1997-10-21 |
| 5506154 | Process for preheat treatment of semiconductor wafers | Hiroyuki Kawahara | 1996-04-09 |