Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7494597 | Method and apparatus for etching disk-like member | Tadamitsu Miyazaki, Kazuya Hirayama, Hiroyasu Futamura | 2009-02-24 |
| 6018884 | Air blow apparatus for a semiconductor wafer | Katsutoshi Kurogi | 2000-02-01 |
| 5922137 | Method of producing a semiconductor wafer and a cleaning apparatus for the same | Katsutoshi Kurogi | 1999-07-13 |
| 5908042 | Basket for cleaning semiconductor wafers and method of cleaning semiconductor wafers using the same | Katsutoshi Kurogi | 1999-06-01 |
| 5875770 | Method of cutting semiconductor ingots and apparatus for cutting thereof | — | 1999-03-02 |
| 5849636 | Method for fabricating a semiconductor wafer | Takamitsu Harada, Kouichi Imura, Masahiko Maeda | 1998-12-15 |