Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6018884 | Air blow apparatus for a semiconductor wafer | Hisaya Fukunaga | 2000-02-01 |
| 5922137 | Method of producing a semiconductor wafer and a cleaning apparatus for the same | Hisaya Fukunaga | 1999-07-13 |
| 5908042 | Basket for cleaning semiconductor wafers and method of cleaning semiconductor wafers using the same | Hisaya Fukunaga | 1999-06-01 |