Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6539959 | Cleaning apparatus for plate-like part and method thereof | Noriyuki Ohroku, Yuichirou Tanaka, Yoichi Takahara, Tomonori Saeki, Susumu Aiuchi +3 more | 2003-04-01 |
| 6443168 | Plate-like specimen fluid-treating apparatus and plate-like specimen fluid-treating method | Fumio Morita, Hitoshi Oka, Noriyuki Oroku, Yuichirou Tanaka | 2002-09-03 |
| 6431190 | Fluid processing apparatus | Hitoshi Oka, Fumio Morita, Akinobu Yamaoka | 2002-08-13 |
| 6401734 | Substrate treating apparatus | Fumio Morita, Hitoshi Oka, Noriyuki Oroku, Yuichirou Tanaka | 2002-06-11 |
| 6315836 | Clean, recirculating processing method which prevents surface contamination of an object | Hitoshi Oka, Fumio Morita, Akinobu Yamaoka | 2001-11-13 |