Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5300321 | Process for depositing titanium nitride film by CVD | Tadashi Nakano | 1994-04-05 |
| 5290736 | Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric | Nobuyoshi Sato, Kyoji Tokunaga, Tomoharu Katagiri, Tsuyoshi Hashimoto | 1994-03-01 |
| 5225245 | Chemical vapor deposition method for forming thin film | Eiichi Kondoh, Tohru Mitomo, Kenichi Otsuka, Hiroshi Sekihashi | 1993-07-06 |
| 5209182 | Chemical vapor deposition apparatus for forming thin film | Eiichi Kondoh, Tohru Mitomo, Kenichi Otsuka, Hiroshi Sekihashi | 1993-05-11 |
| 5117916 | Sprinkler head and operation monitor therefor | Takahiro Nakajima | 1992-06-02 |