Issued Patents All Time
Showing 76–100 of 124 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620401 | Pre-aligner apparatus | — | 2017-04-11 |
| 9489162 | Control system, control apparatus, control method, and non-transitory computer-readable storage medium | Kevin Piazza | 2016-11-08 |
| 9343344 | End effector device | Takayuki Fukushima, Ryosuke Kanamaru, Daiki Miyagawa | 2016-05-17 |
| 9343341 | End effector device and substrate conveying robot including end effector device | Shigeki Ono, Takayuki Fukushima | 2016-05-17 |
| 9333782 | Control unit, control system, control method, and recording medium | Kevin Piazza | 2016-05-10 |
| 9260241 | Plate-shaped member transfer facility | Tetsuya Yoshida | 2016-02-16 |
| 9254566 | Robot having end effector and method of operating the same | Tetsuya Yoshida | 2016-02-09 |
| 9245784 | Substrate retaining device with push back portion | Takayuki Fukushima | 2016-01-26 |
| 9221603 | Plate-shaped member storage rack, plate-shaped member transfer facility, and plate-shaped member storing method | Shigeki Ono, Kenji Bando | 2015-12-29 |
| 9187243 | Plate-shaped member transfer facility | Shigeki Ono, Kenji Bando | 2015-11-17 |
| RE45772 | Wafer transfer apparatus and substrate transfer apparatus | — | 2015-10-20 |
| 8882431 | Substrate transfer robot and substrate transfer system | — | 2014-11-11 |
| 8855818 | Monitoring apparatus for robot | — | 2014-10-07 |
| 8788087 | Robot and instruction method thereof | Nobuyasu Shimomura | 2014-07-22 |
| 8746631 | Article carrier robot | Toshiaki Yoshida, Tetsuya Yoshida | 2014-06-10 |
| 8555744 | Gear mechanism and robot having the same | Yasuo Hirooka | 2013-10-15 |
| 8478443 | Robot system | Kenji Bando | 2013-07-02 |
| 8454068 | Edge grip device and robot including the same | Toshiaki Yoshida | 2013-06-04 |
| 8210789 | Method of assembling substrate transfer device and transfer system unit for the same | — | 2012-07-03 |
| 8121732 | Target position detection apparatus for robot | Nobuyasu Shimomura, Takao Yamaguchi, Tetsuya Yoshida | 2012-02-21 |
| 7942619 | Carrier unit of substrate transfer apparatus | Masao Takatori, Yasuo Hirooka | 2011-05-17 |
| 7874782 | Wafer transfer apparatus and substrate transfer apparatus | — | 2011-01-25 |
| 7651311 | Substrate container opener and opener-side door drive mechanism thereof | Masao Takatori | 2010-01-26 |
| 7644968 | Substrate holding device | Yasuo Hirooka, Kei Watanabe | 2010-01-12 |
| 7383751 | Articulated robot | Eiichi Yamaki | 2008-06-10 |