Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11613021 | Operation system | Shohei Mase, Jun Fujimori, Kenji Noguchi | 2023-03-28 |
| 9202732 | Apparatus and method for detecting substrates | Masayuki Enomoto, Yohichi Nakamura | 2015-12-01 |
| 7942619 | Carrier unit of substrate transfer apparatus | Yasuhiko Hashimoto, Yasuo Hirooka | 2011-05-17 |
| 7651311 | Substrate container opener and opener-side door drive mechanism thereof | Yasuhiko Hashimoto | 2010-01-26 |