Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5407863 | Method of manufacturing semiconductor device | Masahiro Abe, Tomoyuki Iguchi | 1995-04-18 |
| 5261998 | Method for detecting an end point of etching in semiconductor manufacture using the emission spectrum of helium | Shigehiko Kanetake, Masahiro Abe | 1993-11-16 |
| 5175115 | Method of controlling metal thin film formation conditions | Masahiro Abe, Yasukazu Mase, Masaharu Aoyama | 1992-12-29 |
| 5103287 | Multi-layered wiring structure of semiconductor integrated circuit device | Yasukazu Mase, Masahiro Abe | 1992-04-07 |
| 4952528 | Photolithographic method for manufacturing semiconductor wiring patterns | Masahiro Abe, Yasukazu Mase | 1990-08-28 |
| 4933063 | Sputtering device | Masahiro Abe | 1990-06-12 |
| 4897172 | Sputtering chamber structure for high-frequency bias sputtering process | Masahiro Abe | 1990-01-30 |