Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4988609 | Method of forming micro patterns | Hidetsuna Hashimoto, Hitoshi Tsuji | 1991-01-29 |
| 4914006 | Positive resist quaternary ammonium hydroxide containing developer with cationic and nonionic surfactant | Kazuyuki Saito, Norio Ishikawa, Kiyoto Mori | 1990-04-03 |
| 4792534 | Method of manufacturing a semiconductor device involving sidewall spacer formation | Hitoshi Tsuji, Kiyoshi Takaoki | 1988-12-20 |
| 4525523 | Negative-working photoresist coating composition | Hatsuo Nakamura, Toshio Yonezawa, Shigeo Koguchi, Kiyoto Mori, Masahiko Igarashi | 1985-06-25 |
| 4461825 | Method for forming resist pattern | Hatsuo Nakamura, Shigeo Koguchi, Toshio Yonezawa, Toshihiro Abe | 1984-07-24 |