Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7046334 | Displacement correction apparatus, exposure system, exposure method and a computer program product | Tatsuhiko Higashiki | 2006-05-16 |
| 6011611 | Method of measuring aberration of projection optics | Hiroshi Nomura, Takashi Sato, Junichiro Iba | 2000-01-04 |