Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6059887 | Process for cleaning the interior of semiconductor substrate | Hisashi Muraoka, Hiroshi Tomita, Norio Kobayashi | 2000-05-09 |
| 6021789 | Wafer cleaning system with progressive megasonic wave | Hiroyuki Akatsu | 2000-02-08 |
| 5989988 | Semiconductor device and method of manufacturing the same | Toshihiko Iinuma, Kyoichi Suguro | 1999-11-23 |
| 5815942 | Vapor drying system and method | Jin J. Wu, Susan L. Cohen, Russell H. Arndt | 1998-10-06 |
| 5360748 | Method of manufacturing a semiconductor device | Kikuo Yamabe | 1994-11-01 |
| 5098852 | Method of manufacturing a semiconductor device by mega-electron volt ion implantation | Yoshiko Niki, Masaharu Watanabe | 1992-03-24 |