Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8833388 | Pressure controlling apparatus | Hideo Eto, Makoto Saito | 2014-09-16 |
| 8760053 | Power supply control device, plasma processing device, and plasma processing method | Hideo Eto, Makoto Saito, Keiji Suzuki | 2014-06-24 |
| 8651135 | Mass flow controller, mass flow controller system, substrate processing device, and gas flow rate adjusting method | Hideo Eto, Makoto Saito | 2014-02-18 |
| 8062938 | Semiconductor device and method of fabricating the same | Katsunori Yahashi | 2011-11-22 |
| 8036036 | Semiconductor device and a manufacturing method thereof | — | 2011-10-11 |
| 7906435 | Semiconductor device and a manufacturing method thereof | — | 2011-03-15 |
| 7767582 | Method of manufacturing semiconductor device | Kazuhiro Tomioka, Tokuhisa Ohiwa | 2010-08-03 |
| 7723807 | Semiconductor device and a manufacturing method thereof | — | 2010-05-25 |
| 7683436 | Semiconductor device having a pole-shaped portion and method of fabricating the same | Katsunori Yahashi | 2010-03-23 |