Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482443 | Bonding apparatus and bonding method | — | 2022-10-25 |
| 11094574 | Substrate supporting device and plasma processing apparatus | — | 2021-08-17 |
| 10818535 | Plasma processing-apparatus processing object support platform, plasma processing apparatus, and plasma processing method | — | 2020-10-27 |
| 10280121 | Silicon carbide member for plasma processing apparatus | Masahiro Okesaku, Michito Miyahara, Yukio Okudo, Makoto Saito, Hiroshi Sanda | 2019-05-07 |
| 10115615 | Substrate processing apparatus and control method of substrate processing apparatus | — | 2018-10-30 |
| 9370920 | Electrostatic chuck, mount plate support, and manufacturing method of electrostatic chuck | Yasuhiro Nojiri, Makoto Saito | 2016-06-21 |
| 9236229 | Gas supply member, plasma treatment method, and method of forming yttria-containing film | Rikyu IKARIYAMA, Makoto Saito, Sachiyo Ito | 2016-01-12 |
| 9111969 | Seal member, etching apparatus, and a method of manufacturing a semiconductor device | Makoto Saito | 2015-08-18 |
| 8833388 | Pressure controlling apparatus | Makoto Saito, Nobuyasu Nishiyama | 2014-09-16 |
| 8760053 | Power supply control device, plasma processing device, and plasma processing method | Nobuyasu Nishiyama, Makoto Saito, Keiji Suzuki | 2014-06-24 |
| 8689623 | Flow sensor, mass flow controller, and method for manufacturing flow sensor | Makoto Saito | 2014-04-08 |
| 8651135 | Mass flow controller, mass flow controller system, substrate processing device, and gas flow rate adjusting method | Makoto Saito, Nobuyasu Nishiyama | 2014-02-18 |
| 7678567 | Optical biosensor | Ikuo Uematsu, Ichiro Tono, Kayoko Oomiya | 2010-03-16 |
| 7498145 | Concentration measuring method, concentration measuring kit, and sensor chip for use in the method | Kenichi Uchiyama, Kayoko Oomiya, Isao Kishimoto, Masami Hirata, Ichiro Tono +5 more | 2009-03-03 |
| 7410614 | Optical waveguide type iontophoresis sensor chip and method for packaging sensor chip | Kenichi Uchiyama, Ikuo Uematsu, Kayoko Oomiya, Ichiro Tono, Isao Kishimoto +2 more | 2008-08-12 |
| 7054514 | Optical waveguide sensor, device, system and method for glucose measurement | Kenichi Uchiyama, Ichiro Tono, Miki Nagatomo | 2006-05-30 |
| 6903815 | Optical waveguide sensor, device, system and method for glucose measurement | Kenichi Uchiyama, Ichiro Tono, Miki Nagatomo | 2005-06-07 |
| 6767078 | Ink jet head having a nozzle plate | Akira Sato, Ichiro Tono, Masato Sawada, Hiroshi Nishimura, Makoto Saito | 2004-07-27 |