Issued Patents All Time
Showing 51–66 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7407864 | Polysilazane perhydride solution and method of manufacturing a semiconductor device using the same | Atsuko Kawasaki, Keisuke Nakazawa, Osamu Arisumi, Takeshi Hoshi, Katsuhiko Tachibana | 2008-08-05 |
| 7312118 | Semiconductor device and method of manufacturing the same | — | 2007-12-25 |
| 7238587 | Semiconductor device fabrication method | Takeshi Hoshi | 2007-07-03 |
| 7202126 | Semiconductor device and method of manufacturing same | — | 2007-04-10 |
| 7187026 | Semiconductor device and method of manufacturing the same | — | 2007-03-06 |
| 7105397 | Semiconductor device and method of fabricating the same | Katsuhiko Hieda | 2006-09-12 |
| 7071107 | Method for manufacturing a semiconductor device | Katsuhiko Hieda, Atsuko Kawasaki, Katsuhiko Tachibana, Soichi Yamazaki | 2006-07-04 |
| 6982472 | Semiconductor device and capacitor | — | 2006-01-03 |
| 6891218 | Semiconductor device and method of manufacturing same | — | 2005-05-10 |
| 6599794 | Method of manufacturing a semiconductor device and semiconductor device | Kazuhiro Eguchi, Masaaki Nakabayashi, Fumihiko Inoue | 2003-07-29 |
| 6495054 | Etching method and cleaning method of chemical vapor growth apparatus | Kazuhiro Eguchi, Katsuya Okumura, Katsuhiko Hieda, Soichi Yamazaki | 2002-12-17 |
| 6326316 | Method of manufacturing semiconductor devices | Kazuhiro Eguchi | 2001-12-04 |
| 6159868 | Method of forming a high quality layer of BST | Katsuhiko Hieda, Kazuhiro Eguchi | 2000-12-12 |
| 6091099 | Semiconductor device with tantalum and ruthenium | Kazuhiro Eguchi | 2000-07-18 |
| 5686151 | Method of forming a metal oxide film | Keitaro Imai, Haruo Okano | 1997-11-11 |
| 5618761 | Method of manufacturing a perovskite thin film dielectric | Kazuhiro Eguchi, Keitaro Imai | 1997-04-08 |