Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10549312 | Spin coating apparatus and method | — | 2020-02-04 |
| 10218874 | Information processing system, information processing apparatus, information processing method, and information processing program | Akiko KITAYAMA, Yuto Shibata | 2019-02-26 |
| 9793111 | Spin coating method and manufacturing method of electronic component | — | 2017-10-17 |
| 9765783 | Vane-rotary gas compressor | Eiki Yanagawa | 2017-09-19 |
| 9628665 | Information processing system, information processing apparatus, information processing method, and recording medium | Daisuke Okada, Hiroya Uruta, Yuka Saito, Akiko KITAYAMA, Yuto Shibata +1 more | 2017-04-18 |
| 9556872 | Gas compressor formed with a high-pressure supply hole | Eiki Yanagawa | 2017-01-31 |
| 9437476 | Method of manufacturing semiconductor device including air gap between patterns | Ichiro Mizushima, Shinichi Nakao | 2016-09-06 |
| 9431291 | Method of making openings in a semiconductor device with reduced residue by transferring layers | — | 2016-08-30 |
| 9278373 | Spin coating apparatus and method | — | 2016-03-08 |
| 8975196 | Manufacturing method of semiconductor device and manufacturing apparatus of semiconductor device | — | 2015-03-10 |
| 8956132 | Compressor | Keita Satou, Makoto Kawamura, Hiroshi Iijima, Hiroyuki Sato, Yukihiko Ando +6 more | 2015-02-17 |
| 8835279 | Method of manufacturing semiconductor device | — | 2014-09-16 |
| 8659114 | Semiconductor device | — | 2014-02-25 |
| 8652571 | Spin coating method and spin coating apparatus | — | 2014-02-18 |
| 8642409 | Semiconductor device and method of manufacturing the same | — | 2014-02-04 |
| 8629035 | Method of manufacturing semiconductor device | — | 2014-01-14 |
| 8592939 | Semiconductor device and manufacturing method thereof | — | 2013-11-26 |
| 8329553 | Method for manufacturing semiconductor device and NAND-type flash memory | Shogo Matsuo, Takeshi Hoshi, Kazuaki Iwasawa | 2012-12-11 |
| 8080463 | Semiconductor device manufacturing method and silicon oxide film forming method | Kazuaki Iwasawa, Takeshi Hoshi, Shogo Matsuo, Takashi Nakao, Ryu Kato +2 more | 2011-12-20 |
| 7781341 | Method of manufacturing semiconductor device | — | 2010-08-24 |
| 7531408 | Method of manufacturing a semiconductor device containing a PbxSr(1-x)[Zr,Ti]xRu(1-x)O3 film in a capacitor | Koji Yamakawa, Katsuaki Natori, Soichi Yamazaki, Hiroshi Itokawa, Hiroyuki Kanaya | 2009-05-12 |
| 7407864 | Polysilazane perhydride solution and method of manufacturing a semiconductor device using the same | Atsuko Kawasaki, Masahiro Kiyotoshi, Osamu Arisumi, Takeshi Hoshi, Katsuhiko Tachibana | 2008-08-05 |
| 7378329 | Method for manufacturing semiconductor device | Soichi Yamazaki | 2008-05-27 |
| 7259094 | Apparatus and method for heat treating thin film | Katsuaki Natori, Koji Yamakawa, Hiroyuki Kanaya, Yoshinori Kumura, Hiroshi Itokawa +1 more | 2007-08-21 |
| 7233040 | Semiconductor device contains a PbxSr(1−x)[Zr, Ti]xRu(1−x)O3 film in a capacitor | Koji Yamakawa, Katsuaki Natori, Soichi Yamazaki, Hiroshi Itokawa, Hiroyuki Kanaya | 2007-06-19 |