Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7378201 | Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device | Katsuki Ohashi, Akira Ono, Hiroyuki Ikeda | 2008-05-27 |
| 7304730 | Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography mask | Toru Tojo, Takehiko Nomura, Shinichi Imai | 2007-12-04 |
| 7070889 | Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device | Katsuki Ohashi, Akira Ono, Hiroyuki Ikeda | 2006-07-04 |
| 6965687 | Size checking method and apparatus | Eiji Sawa | 2005-11-15 |
| 6888958 | Method and apparatus for inspecting patterns | Eiji Sawa, Satoshi Imi | 2005-05-03 |
| 6849363 | Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device | Katsuki Ohashi, Akira Ono, Hiroyuki Ikeda | 2005-02-01 |
| 6656648 | Pattern inspection apparatus, pattern inspection method and mask manufacturing method | — | 2003-12-02 |
| 5574800 | Pattern defect inspection method and apparatus | Kentaro Okuda | 1996-11-12 |
| 5204025 | Conductive paste composition | Kimiko Yamada, Katuyosi Yada, Yousui Nemoto | 1993-04-20 |
| 4921623 | Copper conductive coating composition | Shoji Yamaguchi, Kimiko Yamada, Katsuyoshi Yada, Koichi Sakaguchi | 1990-05-01 |
| 4922166 | Electron gun for multigun cathode ray tube | Koji Ichida, Yoshifumi Nakayama | 1990-05-01 |
| 4904310 | Method of generating a metal vapor in a metal vapor laser | Kenji Hirata, Hideki Ninomiya, Shigetoshi Yoshino, Jue Mizutani | 1990-02-27 |