Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423192 | Sputtering apparatus and film forming method | Junichi Wada, Tomio Katata, Atsuko Sakata, Koichi Watanabe | 2002-07-23 |
| 6270948 | Method of forming pattern | Yasuhiko Sato, Yoshihiko Nakano, Rikako Kani, Shuji Hayase, Yasunobu Onishi +4 more | 2001-08-07 |
| 6025117 | Method of forming a pattern using polysilane | Yoshihiko Nakano, Rikako Kani, Shuji Hayase, Yasuhiko Sato, Seiro Miyoshi +5 more | 2000-02-15 |