Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837449 | Ti-Nb alloy sputtering target and production method thereof | Takayuki Asano | 2023-12-05 |
| 11830711 | Cobalt sputtering target | Takayuki Asano | 2023-11-28 |
| 11046616 | Tungsten silicide target and method of manufacturing same | Takayuki Asano | 2021-06-29 |
| 10704137 | Master alloy for sputtering target and method for producing sputtering target | Takayuki Asano | 2020-07-07 |
| 10431439 | Tantalum sputtering target | — | 2019-10-01 |
| 10337100 | Sputtering target comprising Ni—P alloy or Ni—Pt—P alloy and production method therefor | Kazumasa Ohashi | 2019-07-02 |
| 10266924 | Tantalum sputtering target | Atsushi Fukushima | 2019-04-23 |
| 10176974 | Tungsten sputtering target and method for producing same | Kazumasa Ohashi | 2019-01-08 |
| 9845528 | Tantalum sputtering target | Atsushi Fukushima, Shinichiro Senda | 2017-12-19 |
| 9732413 | Ruthenium-alloy sputtering target | — | 2017-08-15 |
| 8425696 | Sputtering target | Atsushi Fukushima | 2013-04-23 |
| 8173093 | Iron silicide sputtering target and method for production thereof | Ryo Suzuki | 2012-05-08 |
| 8172960 | Tantalum sputtering target and method of manufacturing same | Atsushi Hukushima | 2012-05-08 |
| 8157973 | Sputtering target/backing plate bonded body | Atsushi Fukushima | 2012-04-17 |
| 8158092 | Iron silicide powder and method for production thereof | Ryo Suzuki | 2012-04-17 |
| 7972583 | Iron silicide sputtering target and method for production thereof | Ryo Suzuki | 2011-07-05 |
| 7892367 | Tantalum sputtering target | — | 2011-02-22 |
| 7740717 | Tantalum sputtering target and method for preparation thereof | — | 2010-06-22 |
| 7740796 | Iron silicide powder and method for production thereof | Ryo Suzuki | 2010-06-22 |
| 7716806 | Tantalum sputtering target and method for preparation thereof | — | 2010-05-18 |
| 7699948 | Ta sputtering target and method for preparation thereof | — | 2010-04-20 |
| 7156963 | Tantalum sputtering target and method for preparation thereof | — | 2007-01-02 |
| 6759143 | Tantalum or tungsten target-copper alloy backing plate assembly and production method therefor | Takeo Okabe, Hirohito Miyashita | 2004-07-06 |
| 6723183 | Silicide target for depositing less embrittling gate oxide and method of manufacturing silicide target | Hirohito Miyashita | 2004-04-20 |