Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9398732 | Power supplying means having shielding means for feeding line and substrate processing apparatus including the same | Jae-Chul Do, Bu-Il JEON, Jung-Rak Lee | 2016-07-19 |
| 8968514 | Gas distributing device and substrate processing apparatus including the same | Jae-Chul Do, Bu-Il JEON, Jung-Rak Lee | 2015-03-03 |
| 7646003 | Focusing apparatus and lithography system using the same | Chang-wook Moon, Dong Soo Kim, Seung-Woon Lee, Yun-sang Oh | 2010-01-12 |