Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9398732 | Power supplying means having shielding means for feeding line and substrate processing apparatus including the same | Jae-Chul Do, Myung-Gon SONG, Jung-Rak Lee | 2016-07-19 |
| 8968514 | Gas distributing device and substrate processing apparatus including the same | Jae-Chul Do, Myung-Gon SONG, Jung-Rak Lee | 2015-03-03 |
| 8177992 | Plasma etching apparatus | — | 2012-05-15 |
| 7951261 | Plasma etching apparatus | — | 2011-05-31 |
| 7879187 | Plasma etching apparatus | — | 2011-02-01 |