Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9398732 | Power supplying means having shielding means for feeding line and substrate processing apparatus including the same | Bu-Il JEON, Myung-Gon SONG, Jung-Rak Lee | 2016-07-19 |
| 8968514 | Gas distributing device and substrate processing apparatus including the same | Bu-Il JEON, Myung-Gon SONG, Jung-Rak Lee | 2015-03-03 |