Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980529 | Radiation-sensitive resin composition, polymer, and resist pattern-forming method | Yasuhiko Matsuda, Norihiko Sugie, Takakazu Kimoto | 2015-03-17 |
| 8765355 | Radiation sensitive resin composition, method for forming a pattern, polymer and compound | Takakazu Kimoto, Mitsuo Sato, Yusuke Asano | 2014-07-01 |
| 8758978 | Radiation-sensitive resin composition, resist pattern formation method, and polymer | Mitsuo Satou | 2014-06-24 |
| 8211624 | Method for pattern formation and resin composition for use in the method | Atsushi Nakamura, Tsutomu Shimokawa, Junichi Takahashi, Takayoshi Abe, Tomoki Nagai | 2012-07-03 |