Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6545755 | Micro-Raman spectroscopy system for identifying foreign material on a semiconductor wafer | Masaru Ishihama, Hiroyuki Hattori, Katsuhide Ueda | 2003-04-08 |
| 5066599 | Silicon crystal oxygen evaluation method using fourier transform infrared spectroscopy (FTIR) and semiconductor device fabrication method using the same | Hiroshi Kaneta | 1991-11-19 |