KU

Katsuhide Ueda

JE Jeol: 1 patents #309 of 669Top 50%
Overall (All Time): #3,507,786 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6545755 Micro-Raman spectroscopy system for identifying foreign material on a semiconductor wafer Masaru Ishihama, Hiroyuki Hattori, Shuichi Muraishi 2003-04-08