Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529210 | Personal safety device | — | 2020-01-07 |
| 6760144 | Articulated MEMS electrostatic rotary actuator | Edward A. Hill, Ramaswamy Mahadevan, Robert L. Wood | 2004-07-06 |
| 6677695 | MEMS electrostatic actuators with reduced actuation voltage | Edward A. Hill | 2004-01-13 |
| 6628039 | Microelectromechanical device having single crystalline components and metallic components | — | 2003-09-30 |
| 6555201 | Method for fabricating a microelectromechanical bearing | David A. Koester, Mark D. Walters, Karen W. Markus | 2003-04-29 |
| 6445842 | Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same | Edward A. Hill | 2002-09-03 |
| 6428173 | Moveable microelectromechanical mirror structures and associated methods | Mark D. Walters, Edward A. Hill, Allen Cowen | 2002-08-06 |
| 6410361 | Methods of fabricating in-plane MEMS thermal actuators | Edward A. Hill, Allen Cowen | 2002-06-25 |
| 6386507 | Microelectromechanical valves including single crystalline material components | Mark D. Walters | 2002-05-14 |
| 6367252 | Microelectromechanical actuators including sinuous beam structures | Edward A. Hill, Allen Cowen, Ramaswamy Mahadevan, Robert L. Wood | 2002-04-09 |
| 6360539 | Microelectromechanical actuators including driven arched beams for mechanical advantage | Edward A. Hill, Allen Cowen, Ramaswamy Mahadevan, Robert L. Wood | 2002-03-26 |
| 6351580 | Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements | Edward A. Hill | 2002-02-26 |
| 6327855 | Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods | Edward A. Hill | 2001-12-11 |
| 6324748 | Method of fabricating a microelectro mechanical structure having an arched beam | Robert L. Wood, Ramaswamy Mahadevan | 2001-12-04 |
| 6291922 | Microelectromechanical device having single crystalline components and metallic components | — | 2001-09-18 |
| 6275320 | MEMS variable optical attenuator | Edward A. Hill, Ramaswamy Mahadevan, Mark D. Walters, Robert L. Wood | 2001-08-14 |
| 6256134 | Microelectromechanical devices including rotating plates and related methods | David A. Koester, Mark D. Walters, Karen W. Markus | 2001-07-03 |
| 6255757 | Microactuators including a metal layer on distal portions of an arched beam | Mark D. Walters | 2001-07-03 |
| 6229684 | Variable capacitor and associated fabrication method | Allen Cowen, Edward A. Hill, David A. Koester, Ramaswamy Mahadevan | 2001-05-08 |
| 6218762 | Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays | Edward A. Hill | 2001-04-17 |
| 6215644 | High frequency tunable capacitors | — | 2001-04-10 |
| 6211598 | In-plane MEMS thermal actuator and associated fabrication methods | Edward A. Hill, Allen Cowen | 2001-04-03 |
| 6134042 | Reflective mems actuator with a laser | David A. Koester, Mark D. Walters, Karen W. Markus | 2000-10-17 |
| 6124663 | Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method | John M. Haake, Robert L. Wood | 2000-09-26 |
| 6114794 | Thermal arched beam microelectromechanical valve | Robert L. Wood, Ramaswamy Mahadevan | 2000-09-05 |