Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428173 | Moveable microelectromechanical mirror structures and associated methods | Vijayakumar R. Dhuler, Mark D. Walters, Edward A. Hill | 2002-08-06 |
| 6410361 | Methods of fabricating in-plane MEMS thermal actuators | Vijayakumar R. Dhuler, Edward A. Hill | 2002-06-25 |
| 6367252 | Microelectromechanical actuators including sinuous beam structures | Edward A. Hill, Vijayakumar R. Dhuler, Ramaswamy Mahadevan, Robert L. Wood | 2002-04-09 |
| 6360539 | Microelectromechanical actuators including driven arched beams for mechanical advantage | Edward A. Hill, Vijayakumar R. Dhuler, Ramaswamy Mahadevan, Robert L. Wood | 2002-03-26 |
| 6333583 | Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams | Ramaswamy Mahadevan, Edward A. Hill, Robert L. Wood | 2001-12-25 |
| 6229684 | Variable capacitor and associated fabrication method | Vijayakumar R. Dhuler, Edward A. Hill, David A. Koester, Ramaswamy Mahadevan | 2001-05-08 |
| 6211598 | In-plane MEMS thermal actuator and associated fabrication methods | Vijayakumar R. Dhuler, Edward A. Hill | 2001-04-03 |