Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6087747 | Microelectromechanical beam for allowing a plate to rotate in relation to a frame in a microelectromechanical device | David A. Koester, Mark D. Walters, Karen W. Markus | 2000-07-11 |
| 6023121 | Thermal arched beam microelectromechanical structure | Robert L. Wood, Ramaswamy Mahadevan | 2000-02-08 |
| 5994816 | Thermal arched beam microelectromechanical devices and associated fabrication methods | Robert L. Wood, Ramaswamy Mahadevan | 1999-11-30 |
| 5966066 | Micromechanical memory sensor | Mehran Mehregany, Kenneth G. Goldman | 1999-10-12 |
| 5962949 | Microelectromechanical positioning apparatus | Robert L. Wood | 1999-10-05 |
| 5955817 | Thermal arched beam microelectromechanical switching array | Robert L. Wood, Ramaswamy Mahadevan | 1999-09-21 |
| 5914801 | Microelectromechanical devices including rotating plates and related methods | David A. Koester, Mark D. Walters, Karen W. Markus | 1999-06-22 |
| 5909078 | Thermal arched beam microelectromechanical actuators | Robert L. Wood | 1999-06-01 |
| 5870518 | Microactuator for precisely aligning an optical fiber and an associated fabrication method | John M. Haake, Robert L. Wood | 1999-02-09 |
| 5712609 | Micromechanical memory sensor | Mehran Mehregany, Kenneth G. Goldman | 1998-01-27 |