Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653306 | Method for forming crystalline cobalt silicide film | Tatsuya Shimoda, Yasuo Matsuki | 2017-05-16 |
| 9257273 | Charged particle beam apparatus, thin film forming method, defect correction method and device forming method | Yoshihiro Koyama, Anto Yasaka, Tatsuya Shimoda, Yasuo Matsuki | 2016-02-09 |