Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5464520 | Silicide targets for sputtering and method of manufacturing the same | Osamu Kano, Koichi Yasui, Yasuyuki Sato, Yasuhiro Yamakoshi, Junichi Anan +1 more | 1995-11-07 |