Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176178 | Scanning ion beam deposition and etch | Sarpangala Hariharakeshava Hegde | 2024-12-24 |
| 11901167 | Ion beam deposition target life enhancement | Sarpangala Hariharakeshava Hegde, Wei-Hua Hsiao, Joseph Barraco | 2024-02-13 |
| 11646171 | Scanning ion beam etch | Sarpangala Hariharakeshava Hegde | 2023-05-09 |
| 11227741 | Scanning ion beam etch | Sarpangala Hariharakeshava Hegde | 2022-01-18 |
| 9863036 | Wafer stage for symmetric wafer processing | Sarpangala Hariharakeshava Hegde, Peter R. Goglia | 2018-01-09 |
| 9865436 | Powered anode for ion source for DLC and reactive processes | Sarpangala Hariharakeshava Hegde | 2018-01-09 |
| 9621141 | Micro-pipeline frequency-comparison circuit | Suwen Yang, Frankie Y. Liu | 2017-04-11 |
| 9184072 | Advanced multi-workpiece processing chamber | Daniel J. Devine, Charles Crapuchettes, Dixit V. Desai, Rene George, Yuya Matsuda +4 more | 2015-11-10 |