SH

Sarpangala Hariharakeshava Hegde

PN Plasma-Therm Nes: 8 patents #1 of 8Top 15%
📍 Fremont, CA: #2,116 of 9,298 inventorsTop 25%
🗺 California: #73,997 of 386,348 inventorsTop 20%
Overall (All Time): #605,231 of 4,157,543Top 15%
8
Patents All Time

Issued Patents All Time

Showing 1–8 of 8 patents

Patent #TitleCo-InventorsDate
12368117 Electrostatic discharge prevention in ion beam system Armin Baur, Wei-Hua Hsiao, Russell Westerman, Jerome Michael Buckley 2025-07-22
12176178 Scanning ion beam deposition and etch Vincent Lee 2024-12-24
11901167 Ion beam deposition target life enhancement Vincent Lee, Wei-Hua Hsiao, Joseph Barraco 2024-02-13
11784025 Integral sweep in ion beam system Armin Baur, Wei-Hua Hsiao 2023-10-10
11646171 Scanning ion beam etch Vincent Lee 2023-05-09
11227741 Scanning ion beam etch Vincent Lee 2022-01-18
9863036 Wafer stage for symmetric wafer processing Vincent Lee, Peter R. Goglia 2018-01-09
9865436 Powered anode for ion source for DLC and reactive processes Vincent Lee 2018-01-09