Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6010538 | In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link | Mei Sun, Herbert E. Litvak, Huey-Ming Tzeng, Daniel E. Glenn, Earl Jensen +1 more | 2000-01-04 |