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Method for fabricating interlevel contacts of aluminum/refractory metal alloys |
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Interlevel contact including aluminum-refractory metal alloy formed during aluminum deposition at an elevated temperature |
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Dynamic random access memory cell |
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1994-10-18 |
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Method making a dynamic random access memory cell with a tungsten plug |
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1992-09-01 |
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Method of improving the corrosion resistance of aluminum contacts on semiconductors |
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1992-06-02 |
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1989-08-22 |
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Method of improving the corrosion resistance of aluminum contacts on semiconductors |
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1989-04-04 |
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Screening of gate oxides on semiconductors |
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1988-07-26 |