Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728381 | Plasma processor and plasma processing method | Akihiro Kikuchi, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi, Kaoru Oohashi +3 more | 2017-08-08 |
| 9437402 | Plasma processor and plasma processing method | Akihiro Kikuchi, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi, Kaoru Oohashi +3 more | 2016-09-06 |
| 8904957 | Plasma processor and plasma processing method | Akihiro Kikuchi, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi, Kaoru Oohashi +3 more | 2014-12-09 |
| 8387562 | Plasma processor and plasma processing method | Akihiro Kikuchi, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi, Kaoru Oohashi +3 more | 2013-03-05 |
| 8056503 | Plasma procesor and plasma processing method | Akihiro Kikuchi, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi, Kaoru Oohashi +3 more | 2011-11-15 |