Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009800 | Measurement system, lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Günes NAKIBOGLU, Hermen Folken Pen, Remco Yuri Van De Moesdijk, Frank Johannes Jacobus Van Boxtel +1 more | 2021-05-18 |
| 7542151 | Method of placing at least one component on at least one substrate as well as such a system | Josephus M. M. Van Gastel, Johannes C. Jans | 2009-06-02 |