Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730191 | Coaxial dressing for chemical mechanical polishing | — | 2004-05-04 |
| 6271140 | Coaxial dressing for chemical mechanical polishing | — | 2001-08-07 |
| 6048775 | Method to make shallow trench isolation structure by HDP-CVD and chemical mechanical polish processes | Liang-Gi Yao, Stanley Hsu, Albert Lin | 2000-04-11 |