Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6329297 | Dilute remote plasma clean | Thomas Nowak, Tsutomu Tanaka, Mark J. Beals | 2001-12-11 |
KB
Kenneth E. Balish
Overall (All Time): #3,602,279 of 4,157,543Top 90%
1
Patents All Time