Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5716486 | Method and apparatus for tuning field for plasma processing using corrected electrode | Gary S. Selwyn, Manoj Dalvie, C. Richard Guarnieri, James J. McGill, Maheswaran Surendra | 1998-02-10 |