Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5716486 | Method and apparatus for tuning field for plasma processing using corrected electrode | Gary S. Selwyn, C. Richard Guarnieri, James J. McGill, Gary W. Rubolff, Maheswaran Surendra | 1998-02-10 |
| 5505780 | High-density plasma-processing tool with toroidal magnetic field | Satoshi Hamaguchi | 1996-04-09 |